发明名称 PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD USING SAME
摘要 A photosensitive composition comprises (A) a resin whose solubility in an alkali developer is increased by the action of an acid, and (B) a compound that generates an acid when exposed to actinic rays or radiation, wherein the resin (A) contains two or more repeating units respectively having acid-decomposable groups that are different from each other in the acid decomposition ratio at an image formation sensitivity.
申请公布号 US2009325102(A1) 申请公布日期 2009.12.31
申请号 US20090493764 申请日期 2009.06.29
申请人 FUJIFILM CORPORATION 发明人 SHIBUYA AKINORI;SHIRAKAWA MICHIHIRO
分类号 G03F7/20;G03F7/004 主分类号 G03F7/20
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