发明名称 METHOD OF MANUFACTURING A LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE
摘要 A method of manufacturing a laterally diffused metal oxide semiconductor (LDMOS) device, and an integrated circuit associated therewith. The method includes forming a lightly-doped source/drain region with a first dopant, the lightly-doped source/drain region located between first and second isolation structures. The method further includes creating a gate over the lightly-doped source/drain region. In one advantageous embodiment of the present invention, the method further includes diffusing a second dopant at least partially across the lightly-doped source/drain region and under the gate to form a first portion of a channel.
申请公布号 US2009325353(A1) 申请公布日期 2009.12.31
申请号 US20090555082 申请日期 2009.09.08
申请人 AGERE SYSTEMS INC. 发明人 PEARCE CHARLES W.
分类号 H01L21/336;H01L21/8234 主分类号 H01L21/336
代理机构 代理人
主权项
地址