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发明名称
VERFAHREN ZUR VERHINDERUNG VON DURCH STRESS HERVORGERUFENER VERSETZUNG IN CMOS BAUELEMENTEN
摘要
申请公布号
DE60140508(D1)
申请公布日期
2009.12.31
申请号
DE20016040508
申请日期
2001.02.14
申请人
NXP B.V.;PHILIPS SEMICONDUCTOR INC.
发明人
MANLEY, MARTIN;NOURI, FARAN
分类号
H01L21/76;H01L21/762;H01L27/08
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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