发明名称 Semiconductor device having super junction
摘要 A semiconductor device includes: a first semiconductor layer; a PN column layer having first and second column layers; and a second semiconductor layer. Each of the first and second column layers includes first and second columns alternately arranged along with a horizontal direction. The first and second column layers respectively have first and second impurity amount differences defined at a predetermined depth by subtracting an impurity amount in the second column from an impurity amount in the first column. The first impurity amount difference is constant and positive. The second impurity amount difference is constant and negative.
申请公布号 US2009321819(A1) 申请公布日期 2009.12.31
申请号 US20080314786 申请日期 2008.12.16
申请人 DENSO CORPORATION 发明人 KAGATA YUMA;SAKAKIBARA JUN;YAMAGUCHI HITOSHI
分类号 H01L29/78 主分类号 H01L29/78
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