| 摘要 |
A compact optical system is provided for delivering laser radiation with high optical efficiency and uniformity. The optical system includes, in order of the propagation of light, an expander for producing a collimated beam, a beam shaper including a flat window with a diffraction pattern on one side for transforming the collimated beam into a square top-hat output beam, a corrector for bending the square top-hat output beam back to a system axis, a scan head to scan the square top-hat output beam across the substrate, and a scan lens to image the beam at the substrate plane.
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