Light conductor arrangement for use as integrated optical circuit, has reflecting surface whose expansion amount is greater than diameter of waveguide, in direction perpendicular to semiconductor substrate

摘要

The arrangement has a separation layer (2) formed on a semiconductor substrate (1), where a waveguide (3) is arranged on the separation layer. The waveguide has a diameter of less than micrometers. A reflecting surface (6) bent opposite to a longitudinal axis of the waveguide is arranged at an end (4) of the waveguide for coupling or uncoupling of light. The expansion amount of the reflecting surface is greater than the diameter of the waveguide, in a direction perpendicular to the substrate. The substrate is made of silicon and the separation layer is made of silicon dioxide. An independent claim is also included for a method for manufacturing a light conductor arrangement.