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发明名称
Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen
摘要
申请公布号
DE60140514(D1)
申请公布日期
2009.12.31
申请号
DE20016040514
申请日期
2001.08.27
申请人
HITACHI LTD.
发明人
TAMATA, SHIN;KOUKUN, RI;IRIE, KAZUYOSHI;SHIBANO, YOSHIKI;KANNO, SHUICHI
分类号
B01D53/34;B01D53/68;B01D53/14;B01D53/70;B01D53/86;C01B9/08;H01L21/302;H01L21/3065
主分类号
B01D53/34
代理机构
代理人
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地址
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