NON-EVAPORABLE GETTER MULTILAYER DEPOSITS OBTAINED BY CATHODIC DEPOSITION AND PROCESS FOR THEIR MANUFACTURING

摘要

DISCLOSED ARE GETTER MULTILAYERS FORMED OF AT LEAST A LAYER (12) OF A NON-EVAPORABLE GETTER ALLOY HAVING A LOW ACTIVATION TEMPERATURE OVER A LAYER (11) OF A DIFFERENT NON-EVAPORABLE GETTER MATERIAL HAVING HIGH SPECIFIC SURFACE, BOTH OBTAINED BY CATHODIC DEPOSITION; THE DEPOSITS OF THE INVENTION SHOE BETTER GAS SORBING CHARACTERISTICS AND ACTIVATION TEMPERATURE LOWER THAN THOSE OF DEPOSITS MADE UP OF A SINGLE MATERIAL. THE PROCESS FOR MANUFACTURING THESE DEPOSITS IS ALSO DISCLOSED.