发明名称 |
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER |
摘要 |
Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc. |
申请公布号 |
EP2137796(A1) |
申请公布日期 |
2009.12.30 |
申请号 |
EP20080742239 |
申请日期 |
2008.03.25 |
申请人 |
CYMER, INC. |
发明人 |
SANDSTROM, RICHARD, L.;CHUNG, TAE, H.;UJAZDOWSKI, RICHARD, C. |
分类号 |
H01S3/0971;H01S3/038;H01S3/097;H01S3/225;H01S3/23 |
主分类号 |
H01S3/0971 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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