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发明名称
AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES
摘要
申请公布号
EP2137762(A1)
申请公布日期
2009.12.30
申请号
EP20080744912
申请日期
2008.04.02
申请人
E. I. DU PONT DE NEMOURS AND COMPANY
发明人
YUASA, ICHIRO;MARUYAMA, YUICHI;TOKI, TERUKAZU;FUKAZU, ISAO
分类号
H01L21/687;B25J9/00;B25J15/00;H01L21/673;H01L21/677
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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