| 摘要 |
<p>Disclosed are a cathode unit capable of forming a film, with superior coatability, on each fine hole with high aspect ratio on the entire surface of a substrate, having a simple device configuration, and manufacturable at low cost and a spattering device having the cathode unit. The cathode unit (C) comprises a holder (3) having one surface in which at least one recess (4) is formed. A bottomed cylindrical target member (5) is fitted to the recess (4) from the bottom side. A magnetic field generating means (7) for generating a magnetic field is assembled in a space (5a) formed in the target member.</p> |
