MAGNETIC FIELD GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS

摘要

A magnetic field generating apparatus that generates a cusp magnetic field on an electrode (1) is mounted on the electrode (1) and comprises a magnet mechanism (6) that holds a plurality of magnets (61) on a holding plate (62) and a rotary mechanism that rotates the holding plate (62). The plurality of magnets (61) are regularly arranged and are arranged so as to be point-symmetrical with respect to a specific point (A1). This specific point (A1) is provided in a position that is offset with respect to the centre of rotation (A2) of the holding plate (62) by the rotary mechanism.