发明名称 PRODUCTION OF SEMICONDUCTOR COMPONENTS
摘要 <p>In producing a semiconductor component, the use of a silicon nitride layer as an etching stencil, provides an exact positioning of various windows, relative one another, in a silicon dioxide layer, arranged on a semiconductor body. The method is particularly suitable for producing high-frequency transistors of comb structure in planar technology.</p>
申请公布号 CA918307(A) 申请公布日期 1973.01.02
申请号 CA19710111441 申请日期 1971.04.27
申请人 SIEMENS AG 发明人 VON HOERSCHELMANN K;HENNING W;WEIDLICH H;KRUEGER I
分类号 H01L21/00;H01L23/29;H01L23/485;H01L29/00 主分类号 H01L21/00
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