SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要
<p>Provided are a sensor device and a method for manufacturing the same for forming convex/concave portions on the surface of a detection layer without complicating the manufacturing process. The sensor device (10) has at least one reaction detection element (11a). The reaction detection element (11a) includes: a detection layer (18) for detecting a specific object; and a temperature detection unit on which the detection layer (18) is arranged and which detects a temperature change of the detection layer (18) (a thermistor substrate (12a) and a detection electrode (14)). The detection layer (18) has cracks or voids formed therein and convex/concave portions on the surface thereof. When forming the detection layer (18) by deposition, an atmospheric gas is introduced so as to form cracks and voids inside the detection layer (18).</p>
