摘要 |
<p>Disclosed is a method for producing a transparent conductive film. The method for producing a transparent conductive film comprises a step wherein a transparent conductive film is formed on a supporting body in a mixed gas atmosphere by a physical film-forming process using a sintered body as a target. In this connection, the sintered body contains Zn, Sn and O, and the mixed gas contains inert gas and oxygen with the oxygen concentration being not less than 0.01% by volume but not more than 0.4% by volume.</p> |