发明名称 METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM
摘要 <p>Disclosed is a method for producing a transparent conductive film.  The method for producing a transparent conductive film comprises a step wherein a transparent conductive film is formed on a supporting body in a mixed gas atmosphere by a physical film-forming process using a sintered body as a target.  In this connection, the sintered body contains Zn, Sn and O, and the mixed gas contains inert gas and oxygen with the oxygen concentration being not less than 0.01% by volume but not more than 0.4% by volume.</p>
申请公布号 WO2009157572(A1) 申请公布日期 2009.12.30
申请号 WO2009JP61793 申请日期 2009.06.22
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED;HASEGAWA, AKIRA 发明人 HASEGAWA, AKIRA
分类号 H01B13/00;C23C14/34 主分类号 H01B13/00
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