| 摘要 |
<p>The present invention allows for a large format substrate plate to move precisely in X, Y and theta rotary directions with an integrated linear XY mechanism The mechanism includes X1, X2 stages which are mounted to the moving substrate plate and Yl and Y2 stages which are mounted to the machine base The slides of the X and Y stages are connected to each other through a revolutß joint The resulting integrated X1Y mechanism can move the substrate plate in X,Y and rotary theta directions preferably by motorizing at least three of the four linear stages with feedback encoders and by using computer controller to command the three motonzed stages to move to their desired positions.</p> |
