MAGNETIC MICROPOSITIONER AND METHOD OF PROVIDING THE SAME

摘要

A micropositioner is provided, which contains an outer magnetic pole-piece and an inner magnetic pole-piece located within the outer magnetic pole piece. At least one permanent magnet is located between the inner magnetic pole piece and the outer magnetic pole -piece. At least one coil is located between the inner magnetic pole-piece and the outer magnetic pole- piece, wherein the at least one coil is capable of directing magnetic flux between the inner magnetic pole-piece and the outer magnetic pole-piece. An outer movable shell is also movably connected to the outer magnetic pole-piece.