TACTILE SENSOR HAVING MEMBRANE STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A tactile sensor having a membrane structure and a manufacturing method thereof are provided to decrease linearity and hysteresis by forming the membrane structure. CONSTITUTION: A polymer layer(100) includes a concave part(150) and a membrane, which is formed by the concave part, in the bottom side. A resistant layer(200) is formed in one side of the polymer layer. A conductive layer(300) is formed around the resistant layer. The polymer layer includes a first polymer layer(110), a second polymer layer(120), and a first adhesive layer(115). The second polymer layer is installed to one side of the first polymer layer. The first adhesive layer adheres the first polymer layer and the second polymer layer.