METHOD AND APPARATUS FOR MANUFACTURING DISPLAY ELEMENT

摘要

Provided are a method and an apparatus for manufacturing a display element, which can detect positions with high accuracy.  The display element manufacturing apparatus is provided with a transfer section (RR) for transferring a substrate (FB) in a first direction; a first alignment system (61) for detecting reference marks (AMR2, AML2); a second alignment system (62) which is arranged at a predetermined distance from the first alignment system in the first direction and detects the reference marks (AMR1, AML1); calculating sections (91, 93), which detect the reference marks and calculate expansion/contraction of the substrate in the first direction or transfer speed of the substrate; and a process section which performs process to a predetermined position on the substrate, based on at least the expansion/contraction of the substrate in the first direction or the transfer speed of the substrate and the reference marks.