发明名称 |
METHOD AND APPARATUS FOR ACHIEVING LOW RESISTANCE CONTACT TO A METAL BASED THIN FILM SOLAR CELL |
摘要 |
<p>A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.</p> |
申请公布号 |
WO2009158408(A1) |
申请公布日期 |
2009.12.30 |
申请号 |
WO2009US48468 |
申请日期 |
2009.06.24 |
申请人 |
SOLOPOWER, INC. |
发明人 |
PINARBASI, MUSTAFA;BASOL, BULENT M. |
分类号 |
H01L21/36 |
主分类号 |
H01L21/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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