| 摘要 |
<p>A wafer frame has a ceiling section, a bottom section and a side wall, which are composed of a metal material; and a space formed by the ceiling section, the bottom section and the side wall. The wafer frame prevents characteristics from changing, has sufficient rigidity, heat resistance and light weight.</p> |
| 申请人 |
JFE TECHNO-RESEARCH CORPORATION;ARIIZUMI, TAKASHI;ONAI, SHINICHI;ABE, MASAHIRO;FUKUDA, YASUTAKA;TOYOOKA, TAKAAKI |
发明人 |
ARIIZUMI, TAKASHI;ONAI, SHINICHI;ABE, MASAHIRO;FUKUDA, YASUTAKA;TOYOOKA, TAKAAKI |
