| 摘要 |
PURPOSE: A coater for a developer solution is provided to discharge bubbles through a bubble outlet rapidly, and to prevent generation of a stain by spreading the developer solution uniformly on the whole substrate at a constant interval. CONSTITUTION: A coater for a developer solution includes the followings: a housing(1) formed to be corresponded to a substrate; a plurality of developer supply holes(16) connected with a developer supply part to supply the developer solution; a developer storage part(25) storing the developer solution, and equipped on the housing; a developer discharge part(15) discharging the developer solution to the substrate; and a discharge unit installed at the bottom of the developer discharge part.
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