An apparatus for An apparatus for generating excimer radiation is provided. The apparatus includes a housing having a housing wall. An electrode is configured within the housing. A tubular body is around the electrode. The tubular body includes an outer wall and an inner wall. At least one inert gas is between the outer wall and the inner wall, wherein the housing wall and the electrode are configured to excite the inert gas to illuminate an excimer light for curing.
申请公布号
WO2009131889(A9)
申请公布日期
2009.12.30
申请号
WO2009US40809
申请日期
2009.04.16
申请人
APPLIED MATERIALS, INC.;LUBOMIRSKY, DMITRY;RASHEED, MUHAMMAD, M.;YIEH, ELLIE, Y.
发明人
LUBOMIRSKY, DMITRY;RASHEED, MUHAMMAD, M.;YIEH, ELLIE, Y.