发明名称 FLOTOX-TYPE EEPROM AND METHOD FOR MANUFACTURING THE SAME
摘要 A FLOTOX-TYPE EEPROM of the invention has a configuration wherein an N region 25 as an impurity region formed under a tunnel window 12 and a channel stopper region 19 formed under a LOCOS oxide film 18 are spaced apart by a predetermined distance Y. Therefore, the tunnel window 12 does not sustain damage if an excessive voltage is applied to the tunnel window 12. As a result, the FLOTOX-TYPE EEPROM is adapted to limit the voltage applied to the tunnel window 12 and to reduce stress on the tunnel window 12 and can achieve an increased number of rewrites.
申请公布号 EP2139035(A1) 申请公布日期 2009.12.30
申请号 EP20080740518 申请日期 2008.04.16
申请人 ROHM CO., LTD. 发明人 SEKIGUCHI, YUSHI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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