| 摘要 |
PURPOSE: A spin chuck device is provided to prevent separation of a mask from a spin chuck by fixing the mask to the spin chuck through a fixing pin. CONSTITUTION: A mask is arranged on a base(100). A rotary shaft(110) is connected to a central part of a rear surface of the base in order to rotate the base. A fixing pin(120) is protruded from each edge of the base, fixes the mask to a spin chuck, and includes a first protrusion part(121), a second protrusion part(122), and a third protrusion part(123). The first protrusion part is contacted with an edge of a rear surface of the mask. The second protrusion part is contacted with a side surface of the mask. One side of the third protrusion part is trimmed as 45°.
|
