发明名称 Faceted catalytic dots for directed nanotube growth
摘要 Faceted catalytic dots are used for directing the growth of carbon nanotubes. In one example, a faceted dot is formed on a substrate for a microelectronic device. A growth promoting dopant is applied to a facet of the dot using an angled implant, and a carbon nanotube is grown on the doped facet of the dot.
申请公布号 US7638383(B2) 申请公布日期 2009.12.29
申请号 US20060524067 申请日期 2006.09.19
申请人 INTEL CORPORATION 发明人 JIN BEEN-YIH;CHAU ROBERT S.;DOYLE BRIAN S.;RADOSAVLJEVIC MARKO
分类号 H01L21/336;H01L21/8234 主分类号 H01L21/336
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