| 摘要 |
A stage apparatus includes a stationary support plate; a stage member provided on the stationary support plate so as to move on a reference plane parallel with the stationary support plate; Y-direction magnetic flux generating devices secured to one of the stationary support plate and the stage member; and Y-direction moving coils secured to the other of the stationary support plate and the stage member, the Y-direction moving coils receiving magnetic flux from the Y-direction magnetic flux generating devices so as to generate a driving force in a specific Y-direction between the Y-direction magnetic flux generating devices and the Y-direction moving coils. The Y-direction moving coils are secured to the stage member so that the Y-direction moving coils at least partly overlap each other in an X-direction, which is parallel with the reference plane and perpendicular to the Y-direction, and do not overlap in the Y-direction.
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