SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
<p>A table is disclosed in which an opening is provided for the provision of immersion fluid onto a top surface of the table. In an embodiment, there are two such openings. The first of the openings surrounds a substrate support of the table and the second of the openings extends around an outer edge of the table.</p>
申请公布号
SG157327(A1)
申请公布日期
2009.12.29
申请号
SG20090034802
申请日期
2009.05.21
申请人
ASML NETHERLANDS B.V.
发明人
CASTELIJNS, HENRICUS, JOZEF;TEN KATE, NICOLAAS;SHULEPOV, SERGEI;ARTS, PETRUS, MARTINUS, GERARDUS, JOHANNES
