发明名称 |
MEMS suspension and anchoring design |
摘要 |
A MEMS device that has a sensitivity to a stimulus in at least one sensing direction includes a substrate, a movable mass with corner portions suspended in proximity to the substrate, at least one suspension structure coupled approximately to the corner portions of the movable mass for performing a mechanical spring function, and at least one anchor for coupling the substrate to the at least one suspension structure. The at least one anchor is positioned approximately on a center line in the at least one sensing direction.
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申请公布号 |
US7637160(B2) |
申请公布日期 |
2009.12.29 |
申请号 |
US20060479792 |
申请日期 |
2006.06.30 |
申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
KOURY, JR. DANIEL N.;MCNEIL ANDREW C. |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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