METHOD OF MEASUREMENT OF AMPLITUDE-FREQUENCY CHARACTERISTICS OF MOBILE ELEMENTS OF MICRO-MECHANIC SYSTEMS

摘要

FIELD: measuring technology. ^ SUBSTANCE: invention refers to micro-mechanics and is designed for measurement of frequency characteristics of mobile elements of micro-mechanical devices. The method consists in generating harmonic signals with constant component from fixed condenser plates, while constant shifting equal to zero is set on a mobile plate. Also there is extracted the second harmonic of sum of charges running through condensers formed with mobile and fixed plates of a sensitive element. The amplitude-frequency characteristic of micro-mechanic device is determined with ratio of the second harmonic of obtained sum of charges to the first harmonic of the signal formed on plates of the condenser. ^ EFFECT: facilitating expanded functionality and upgraded accuracy of measurement of amplitude-frequency characteristics. ^ 2 cl, 3 dwg