| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atomic force microscope probe structure which is cost-effectively manufactured to achieve ultrahigh resolution and high yield. <P>SOLUTION: This atomic force microscope (AFM) probe structure includes a cantilever (8) and a planar type tip (19) mounted on the cantilever (8) extending along its longitudinal direction (x). The planar type tip (19) includes at least one corner on a position far from the cantilever (8), this corner (8) is a two-dimensional shape so as to contact scanning surface (18) when used. <P>COPYRIGHT: (C)2010,JPO&INPIT |
