| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device capable of reducing temperature irregularity occurring in a substrate, and preventing occurrence of film thickness irregularity of a liquid body; and a coating method. SOLUTION: Since a gas jetting part jetting gas to a substrate is provided for a substrate transport part, and a temperature regulating part for regulating the temperature of the gas is arranged, the temperature of the gas jetted to the substrate can be regulated by the temperature regulating part. Thereby, temperature irregularity occurring in the substrate can be reduced, and occurrence of film thickness irregularity of a liquid body can be prevented. COPYRIGHT: (C)2010,JPO&INPIT |
