发明名称 METHOD OF PREPARING HEATED OZONE WATER
摘要 PROBLEM TO BE SOLVED: To provide a method of preparing heated ozone water capable of efficiently preparing heated ozone water of a high ozone concentration by suppressing the decrease of the ozone concentration in ozone water of a high ozone concentration. SOLUTION: The method of preparing heated ozone water by heating ozone water prepared by dissolving ozone gas into pure water or pure water comprising carbon dioxide, is characterized by heating ozone water up to 60 to 90°C at a temperature increase rate of 6.0 to 10.0°C/sec by using a heat exchanging means 2 that employs a liquid as a heating medium. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009297588(A) 申请公布日期 2009.12.24
申请号 JP20080151157 申请日期 2008.06.10
申请人 NOMURA MICRO SCI CO LTD 发明人 JIZAIMARU TAKAYUKI;EGUSA KAZUTOMO
分类号 B08B3/08;B08B3/10;C02F1/78;G03F7/42;H01L21/304 主分类号 B08B3/08
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