发明名称 |
METHOD OF PREPARING HEATED OZONE WATER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of preparing heated ozone water capable of efficiently preparing heated ozone water of a high ozone concentration by suppressing the decrease of the ozone concentration in ozone water of a high ozone concentration. SOLUTION: The method of preparing heated ozone water by heating ozone water prepared by dissolving ozone gas into pure water or pure water comprising carbon dioxide, is characterized by heating ozone water up to 60 to 90°C at a temperature increase rate of 6.0 to 10.0°C/sec by using a heat exchanging means 2 that employs a liquid as a heating medium. COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2009297588(A) |
申请公布日期 |
2009.12.24 |
申请号 |
JP20080151157 |
申请日期 |
2008.06.10 |
申请人 |
NOMURA MICRO SCI CO LTD |
发明人 |
JIZAIMARU TAKAYUKI;EGUSA KAZUTOMO |
分类号 |
B08B3/08;B08B3/10;C02F1/78;G03F7/42;H01L21/304 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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