| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a surface light emitting laser array (VCSEL) with high reliability, and an image forming apparatus that performs high-speed or high-resolution writing using the manufactured surface light emitting laser array. SOLUTION: The surface light emitting laser single element (VCSEL single element) has DBRs (reflectors) 102 and 106 each made of an AlGaAs high-refractive-index layer and a low-refractive-index layer at least partially different in Al composition, and an active layer 103 sandwiched between the DBRs, and performs current constriction by a selectively oxidized layer 105, wherein a wiring width W2 of mesa-side wall portion wiring which is wiring for implanting a current into the VCSEL element and connects a mesa bottom portion from the upper portion of the mesa of the VCSEL element as a projection portion is wider than a wiring width W3 of wiring formed at the mesa bottom portion as a recessed portion. COPYRIGHT: (C)2010,JPO&INPIT
|
