发明名称 |
PROCESS FOR PREPARING CERAMICS, CERAMICS THUS OBTAINED AND USES THEREOF, ESPECIALLY AS A SPUTTERING TARGET |
摘要 |
Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.
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申请公布号 |
US2009315001(A1) |
申请公布日期 |
2009.12.24 |
申请号 |
US20070301430 |
申请日期 |
2007.05.17 |
申请人 |
HYDRO-QUEBEC;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
CAMPET GUY;SAADEDDIN IYAD;ZAGHIB KARIM |
分类号 |
H01B1/02;C23C14/34 |
主分类号 |
H01B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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