发明名称 PRESSURE MEASUREMENT USING A MEMS DEVICE
摘要 A device to measure pressure is disclosed. In one embodiment, the device comprises at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.
申请公布号 US2009319220(A1) 申请公布日期 2009.12.24
申请号 US20080141326 申请日期 2008.06.18
申请人 QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 KHAZENI KASRA
分类号 G01L9/08 主分类号 G01L9/08
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