| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely prevent discharging to surroundings of high frequency noises generated extensively in a process for generating atmospheric plasma. <P>SOLUTION: Gas 13 is supplied to an reaction tube 11 having a specific space in the atmosphere or its vicinity and a noise canceling antenna 16 is arranged in a generating position of plasma 14 generated by impressing high frequency voltage to an antennal 6 near the reaction tube 11, and the high frequency voltage having the same high frequency with the high frequency voltage to be impressed to the antenna 6 and having a specific phase differential and amplitude is supplied to the noise canceling antenna 16 to generate a noise canceling electric wave so as to prevent discharging of noises. Moreover, the phase differential and the amplitude are adjusted and set beforehand so that noises measured near the generation position of the plasma 14 by a noise measuring means 21 is minimal or its vicinity. <P>COPYRIGHT: (C)2010,JPO&INPIT |
