| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device which gradually can change scanning pattern of a laser beam, while compensating error in accuracy of position detecting element to enable correct position control of an actuator. SOLUTION: In this light irradiation system, a plurality of angle indicator values depending on each scanning pattern are stored in a memory 301d of DSP 301 within a scanner controller 300 as control parameters. If a system controller 100 has instructed switching of the scanning pattern, the angle indicator values are read out of the memory 301d so as not to allow discontinuous variation in position indicator values of the actuator 202 to be set on a target angle indication table setting part 301e. In addition, any angle indicator value to be stored in the memory 301d will be compensated with corrected values which negates nonlinear errors of PSD 204a. COPYRIGHT: (C)2010,JPO&INPIT
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