NOZZLE SUBSTRATE, MANUFACTURING METHOD OF NOZZLE SUBSTRATE, LIQUID DROPLET DISCHARGE HEAD, AND DROPLET DISCHARGING DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To provide a nozzle substrate having a structure which enables a manufacturing method to be simplified and a nozzle hole to be formed with high precision. Ž<P>SOLUTION: The nozzle substrate 1 wherein the nozzle hole 11 for discharging a liquid droplet was formed has a configuration with which a plurality of substrates are stacked and joined. In substrates 1a and 1b, nozzle zones 11a and 11b with inside diameters differing for every substrate are formed by penetration, respectively, in the nearly vertical direction, and a plurality of substrates 1a and 1b are stacked so that the inside diameter of the nozzle zone may become larger gradually to form the nozzle hole 11 of cross-sectional stair configuration. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž