| 发明名称 |
MELT PURIFICATION AND DELIVERY SYSTEM |
| 摘要 |
An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.
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| 申请公布号 |
US2009315220(A1) |
申请公布日期 |
2009.12.24 |
| 申请号 |
US20090487058 |
申请日期 |
2009.06.18 |
| 申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK |
| 分类号 |
B29C39/02;B22D29/00;B67D7/72 |
主分类号 |
B29C39/02 |
| 代理机构 |
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代理人 |
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