发明名称 SPECTROSCOPIC MODULE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a spectroscopic module capable of improving reliability. <P>SOLUTION: A light passage hole 5b for passing light L1 traveling to a spectroscopic part 4 is formed in a photo-detection element 5 in the spectroscopic module 1. It is therefore possible to prevent the occurrence of deviations in the relative positional relation between the light passage hole 5b and a photo-detection part 5a of the photo-detection element 5. The light to be measured L1 traveling to the spectroscopic part 4 via the light passage hole 5b and diffracted light L2 traveling from the spectroscopic part 4 to the photo-detection part 5a passes through an air gap formed between the photo-detection element 5 and a substrate 2 by an opening part 10a of a wiring board 10. Since events such as the scattering of the light to be measured L1 and the diffracted light L2 due to a resin agent 16 etc. interposed between the photo-detection element 5 and the substrate 2 are thereby prevented, it is possible to reduce the occurrence of stray light. It is therefore possible to improve reliability by the spectroscopic module 1. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009300423(A) 申请公布日期 2009.12.24
申请号 JP20080311086 申请日期 2008.12.05
申请人 HAMAMATSU PHOTONICS KK 发明人 SHIBAYAMA KATSUMI
分类号 G01J3/18 主分类号 G01J3/18
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