| 摘要 |
PROBLEM TO BE SOLVED: To reduce distortion due to a thermal stress as much as possible at the time of welding a frame 4 and a diaphragm 3, enhance rigidity between the frame 4 and the diaphragm 3, and reduce a change of a distance between a fixed electrode 2 and the diaphragm 3 as much as possible to stabilize the output of a pressure sensor 1. SOLUTION: A capacitance type pressure sensor measuring pressure by detecting a change of a capacitance between the diaphragm 3 and the fixed electrode 2 which are displaced by the pressure includes a recessed part 41 which prescribes a distance between opposing surfaces of the fixed electrode 2 and the diaphragm 3, and the cast frame 4 having an electrode plane of the fixed electrode 2 disposed on a plane substantially flush with a bottom surface 411 of the recessed part and the diaphragm 3 disposed on an open periphery 401 of the recessed part 41 to cover the recessed part 41. COPYRIGHT: (C)2010,JPO&INPIT |
