| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a positioning apparatus capable of stable detection of a position and a rotation angle of a slider with an inexpensive and simple structure and having high freedom in design. Ž<P>SOLUTION: The positioning apparatus includes the slider 1 whose position is controlled in at least one of X- and Y-axial directions orthogonal to each other, a platen having cogs of a magnetic pole formed on a plane opposite to the slider 1 for constituting a plane motor with the slider 1, and a sensor for detecting the position of the slider 1 with respect to the platen. The apparatus is characterized by that it includes the sensor for detecting the position of the slider 1 with respect to the platen based on outputs from resolvers 21 and 22 provided on the slider 1 and a rotation angle detecting part 4 for detecting a rotation angle of the slider 1 based on the outputs from the resolvers 21 and 22. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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