| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrostatic bearing device and a support method of a support object by the hydrostatic bearing device, capable of correcting a position or an attitude of the support object even to the quick movement of the support object. Ž<P>SOLUTION: A control device of the hydrostatic bearing device operates a piezoelectric actuator of a volume changing device 4 when a displacement speed of a slide table 2 to a base 1 is larger than a predetermined value G based on a detection result by position sensors 5a-5c, and corrects the position or the attitude of the slide table 2 to the base 1 by changing pressure in pockets 27a and 27e by increasing-decreasing the pockets 27a and 27e. When the displacement speed of the slide table 2 to the base 1 is the predetermined value G or less, the position or the attitude of the slide table 2 to the base 1 is corrected by changing at least any of pressure or quantity of hydraulic pressure supplied in the pockets 27a-27f by a hydraulic device. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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