| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical element capable of balancing reduction of capacitance with high conversion efficiency. SOLUTION: This semiconductor optical element 10 is provided with an optical waveguide of a mesa structure formed on a substrate and including an active layer, and an embedding layer covering both side faces of the mesa structure and formed of a high-resistance semiconductor. The optical waveguide of the mesa structure includes a plurality of single mode optical waveguides 11S, and one or more multimode interference optical waveguides 11M optically serially connected to one another through the single mode optical waveguides 11S. The cross-sectional area of all of the optical waveguides in the light transmission direction is in the range of 1.4 to 3 times as much as the product of the total length of the optical waveguides and the width of the single mode optical waveguide 11S. COPYRIGHT: (C)2010,JPO&INPIT
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