| 摘要 |
PROBLEM TO BE SOLVED: To provide a scattering characteristic evaluating apparatus capable of adjusting so as to able to irradiate a surface of a sample to be evaluated such as a translucent film and the like, with a light flux along all directions in which the optical axis does not always become perpendicular to the surface, and capable of capturing a distribution of the intensity of scattered light which is generated by bringing the light flux to pass through the sample to be evaluated, at each minute angle of the scattered light. SOLUTION: The scattering characteristic evaluating apparatus 10 includes; a holding section 5 for holding the plate-like object sample to be evaluated F on the optical axis; a condenser lens 4 for condensing the scattered light being scattered by the object sample to be evaluated F to a detector; and an evaluating section 24 for evaluating an optical transmitting/scattering characteristic of the object sample to be evaluated F, based on outputs of respective detecting elements of the detector 2. The holding section 5 comprises an angle adjusting mechanism 3 which can adjust an angleΨof the surface of the object sample to be evaluated F to the optical axis. The evaluating section 24 is characterized by evaluating the optical transmitting/scattering characteristic of the object sample to be evaluated F in such the state that the relation between the surface and the optical axis is represented by the angleΨ. COPYRIGHT: (C)2010,JPO&INPIT
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