| 摘要 |
PURPOSE: A vibration isolation device is provided to display high vibration isolation efficiency, to maintain the precise horizontality of a worktable always and to restore quickly a worktable at level even if eccentric load occurs on a worktable, thereby to improve the iterative precision on the position of a worktable. CONSTITUTION: A vibration isolation device(101) contains an air damper(105) functioning as a support member and supported at three points between a worktable and the ground, a leveling sensor fixed between support brackets extended to one side of the air damper and formed to make automatic horizontality adjustment possible even if eccentric load occurs on a worktable by sensing with a pressure control valve, and a worktable(102).
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