| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of inspecting defects which inspects defects in a transparent layer containing no fluorescent agent, by irradiation with ultraviolet light. <P>SOLUTION: When forming the transparent layer 5, an ultraviolet absorber is contained in the transparent layer 5. At inspection, with placing a light source 10, which irradiates ultraviolet light, on one side of the transparent layer 5 and placing a fluorescent layer on the other side of the transparent layer 5, wherein the fluorescent layer 6 contains a fluorescent agent which emits visible light through stimulated emission by ultraviolet light, being irradiated with ultraviolet light from the light source 10, defects in the transparent layer 5 are inspected based on the luminescence state of visible light in the fluorescent layer 6, in response to the irradiation. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
