| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for manufacturing a force detection sensor for assembling a diaphragm in which a large-diameter recess and a small-diameter projection are formed concentrically on a pressure reception surface, and a force transmission rod. Ž<P>SOLUTION: A process for manufacturing the force detection sensor includes: a recess formation process for forming the recess on the pressure reception surface 13a of a material 13 that becomes a diaphragm; and a projection completion process for completing the projection inside the formed recess. In the recess formation process, a pressure pin 8 in which a plane in a shape corresponding to the bottom surface of the recess is formed on an apical surface 8b is pressed to the surface side of the pressure reception surface 13a of the material 13 supported by a guide ring 4 and a lifter 6. The recess is formed on the pressure reception surface 13a at a part in contact with the apical surface 8b in a planar shape. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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