| 摘要 |
PROBLEM TO BE SOLVED: To provide a profilometer capable of determining surface profile of a measured object correctly, while alleviating time and labor required for measurement. SOLUTION: The profilometer, which includes a ranging section emitting ranging light (16) and receiving the ranging light reflected from a surface of a measured object (8) to measure a distance of ranging light to an irradiating dot (18) on the surface of the measured object, an angle measuring section measuring an angle from a reference direction of a telescope (2), and a motor rotating the telescope, computes a prediction coordinate (X<SB>1</SB>, h<SB>3</SB>) of the surface of the measured object just above the selected dot (X<SB>1</SB>, Z<SB>1</SB>) on a predetermined horizontal plane (10), trains the telescope toward a point of the prediction coordinate value to perform range measurement to the irradiating dot on the surface of the measured object through emission of ranging light, computes a coordinate (X<SB>4</SB>, Z<SB>4</SB>) of the irradiating dot from the range to the irradiating dot and the angle detected at the angle measuring section, computes a horizontal distance (¾X<SB>4</SB>-X<SB>1</SB>¾) between the irradiating dot and the selected dot, and memorizes as a coordinate value to obtain the prediction coordinate value, when the horizontal distance is within a predetermined range. COPYRIGHT: (C)2010,JPO&INPIT
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